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  • KrF深紫外光刻膠系列

    Kind       型號Performance                    性  能Application                  應  用
    DK1081R:0.18μm,Thickness   range:0.4um-0.8μmAA/Poly/CT
    DK1080R:0.25μm,Thickness   range:0.55μm-1.0μmImplant/AA/CT
    DK1088R:0.25μm,Thickness   range:0.8μm-1.4μmTV/TM/Implant
    DK1089R:0.25μm,Thickness   range:0.8μm-1.4μmTV/TM/Implant
    DK1087R:1μm,Thickness range:3-4μmSpecial application/ PAD
    DK2060R:0.25μm,Thickness:0.55-0.8μmContact/Hole
    DK3030R:0.25μm,Thickness:0.6-0.8μmAA/Metal/Contact/Hole
    DKN1100Krf Negative PR   R:0.20μm,Thickness:0.4-0.8μmSAB/Implant